Novel Symmetrical Dual-Directional SCR With p-Type Guard Ring for High-Voltage ESD Protection

被引:4
|
作者
Du, Feibo [1 ]
Chang, Kuan-Chang [1 ]
Lin, Xinnan [1 ]
Hou, Fei [2 ]
Chen, Le [3 ]
Luo, Xun [3 ]
Liu, Zhiwei [3 ]
机构
[1] Peking Univ, Shenzhen Grad Sch, Sch Elect & Comp Engn, Shenzhen Key Lab Adv Elect Device & Integrat, Shenzhen 518055, Peoples R China
[2] Chengdu Univ, Sch Elect Informat & Elect Engn, Chengdu 610106, Peoples R China
[3] Univ Elect Sci & Technol China, Ctr Adv Semicond & Integrated Microsyst, Chengdu 611731, Peoples R China
关键词
Electrostatic discharges; Resistors; Silicides; Voltage measurement; Current measurement; Transmission line measurements; Topology; Dual-directional silicon-controlled rectifier (DDSCR); electrostatic discharge (ESD); guard ring; high voltage (HV); holding voltage;
D O I
10.1109/TED.2021.3091658
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The negative holding voltage of high-voltage (HV) dual-directional silicon-controlled rectifier (DDSCR) is usually attenuated to a very low level due to the grounded guard ring, which has been ignored by many researchers nowadays. In this brief, a novel symmetrical DDSCR (SDDSCR) is proposed to suppress the deterioration of DDSCR's negative holding voltage. By introducing a diffusion resistor into the p-type guard ring (PGR), experimental results indicated that the reverse parasitic SCR path associated with PGR is suppressed effectively. Thus, a symmetric high holding voltage characteristic is implemented for SDDSCR without increasing any silicon footprint. Moreover, the PGR resistor technology presented in this brief can be extended to various existing HV DDSCRs, which could improve their negative holding voltage deteriorated by guard ring.
引用
收藏
页码:4164 / 4167
页数:4
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