Preparation and characterization of BaTiO3 thick films with Li2O-SiO2 sintering aid

被引：17

作者：

Nakaiso, T ^{[1
]}

Kageyama, K ^{[1
]}

Ando, A ^{[1
]}

Sakabe, Y ^{[1
]}

机构：

[1] Murata Mfg Co Ltd, Kyoto 6178555, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 9B期

关键词：

BaTiO3; screen printing; thick film; sintering aid; piezoelectric;

D O I：

10.1143/JJAP.44.6878

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of adding a Li2SiO3 (LSO) sintering aid for low temperature fabrication of BaTiO3 (BT) thick films was investigated. LSO-added BT thick films were prepared by the screen printing method on Pt-coated ZrO2 substrates. Their sintering properties were significantly improved by the addition of LSO, and the relative density of the BT thick film fired in air at 1200 degrees C was 96%. The secondary phase was not observed. The dielectric, ferroelectric, and piezoelectric properties of the LSO-added BT thick films were examined. A typical ferroelectric hysteresis loop was observed, and the remnant polarization (P-r) was 7.5 mu C/cm(2). The dielectric constant was 3200, and tan delta was 2.1%. The maximum piezoelectric constant d(31) calculated from the displacement of the Pt/BT/Pt/ZrO2 monomorph cantilever was -140 pm/V, and d(33) measured with an atomic force microscope was 320 pm/V.

引用

页码：6878 / 6880

页数：3

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