Optimal ADF STEM imaging parameters for tilt-robust image quantification

被引：26
作者：
MacArthur, K. E. [1 ]
D'Alfonso, A. J. [2 ]
Ozkaya, D. [3 ]
Allen, L. J. [2 ]
Nellist, P. D. [1 ]
机构：
[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[2] Univ Melbourne, Sch Phys, Parkville, Vic 2010, Australia
[3] Johnson Matthey Technol Ctr, Reading RG4 9NH, Berks, England
来源：
ULTRAMICROSCOPY | 2015年 / 156卷
基金：
澳大利亚研究理事会; 英国工程与自然科学研究理事会;
关键词：
Quantitative ADF; Electron channelling; Sample tilt; ELECTRON; ATOMS; THICKNESS; DOPANT;
D O I：
10.1016/j.ultramic.2015.04.010
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
An approach towards experiment design and optimisation is proposed for achieving improved accuracy of ADF STEM quantification. In particular, improved robustness to small sample mis-tilts can be achieved by optimising detector collection and probe convergence angles. A decrease in cross section is seen for tilted samples due to the reduction in channelling, resulting in a quantification error, if this is not taken into account. At a smaller detector collection angle the increased contribution from elastic scattering, which initially increases with tilt, can be used to offset the decrease in the TDS signal. (C) 2015 Elsevier B.V. All rights reserved.
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收藏
页码：1 / 8
页数：8
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