Measuring sputtering yields of high energy heavy ions on metals

被引：25
作者：
Mieskes, HD
Assmann, W [1 ]
Brodale, M
Dobler, M
Glückler, H
Hartung, P
Stenzel, P
机构：
[1] Univ Munich, Sekt Phys, D-85748 Garching, Germany
[2] Rossendorf Inc, Forschungszentrum Rossendorf EV, D-01314 Dresden, Germany
[3] Paul Scherrer Inst, CH-5232 Villigen, Switzerland
[4] Beschleunigelab, D-85748 Garching, Germany
[5] GeMeTec, D-81379 Munich, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1998年 / 146卷 / 1-4期
关键词：
D O I：
10.1016/S0168-583X(98)00444-3
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
For measuring sputtering yields with MeV heavy ions only low current densities can be used in order to avoid excessive target heating. Consequently self-cleaning of the target surface during the irradiation cannot be achieved and a contamination free surface has to be maintained by means of UHV conditions. A UHV-setup including a differential pumping system has been designed and operated at a vacuum of 10(-10) mbar during experiments. Sputtered particles were collected on Si catchers and subsequently measured by two different surface analysis methods: Total Reflection X-Ray Fluorescence (TXRF), and Heavy Ion Rutherford Backscattering Spectrometry (HI-RBS), In-situ surface cleaning by 8 keV Xe ions as well as online monitoring by ERDA were found to be essential. With sufficient precautions on the surface conditions reproducible sputtering yields were obtained. First measurements for 230 MeV Au ions on Au, Zr, and Ti targets are presented. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：162 / 171
页数：10
相关论文
共 15 条
[1]   SETUP FOR MATERIALS ANALYSIS WITH HEAVY-ION BEAMS AT THE MUNICH MP TANDEM [J].
ASSMANN, W ;
HARTUNG, P ;
HUBER, H ;
STAAT, P ;
STEFFENS, H ;
STEINHAUSEN, C .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4) :726-731
[2]   FESTKORPERZERSTAUBUNG DURCH IONENBESCHUSS [J].
BEHRISCH, R .
ERGEBNISSE DER EXAKTEN NATURWISSENSCHAFTEN, 1964, 35 :295-443
[3]  
BEHRISCH R, 1991, TOPICS APPL PHYSICS, V64
[4]   A UHV-COMPATIBLE DELTA-E-E GAS TELESCOPE FOR DEPTH PROFILING AND SURFACE-ANALYSIS OF LIGHT-ELEMENTS [J].
BEHROOZ, AM ;
HEADRICK, RL ;
SEIBERLING, LE ;
ZURMUHLE, RW .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (01) :108-112
[5]   QUANTITATIVE ELASTIC RECOIL DETECTION [J].
BERGMAIER, A ;
DOLLINGER, G ;
FREY, CM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4) :488-490
[6]   A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].
BIERSACK, JP ;
HAGGMARK, LG .
NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269
[7]   TRACKS IN METALS BY MEV FULLERENES [J].
DAMMAK, H ;
DUNLOP, A ;
LESUEUR, D ;
BRUNELLE, A ;
DELLANEGRA, S ;
LEBEYEC, Y .
PHYSICAL REVIEW LETTERS, 1995, 74 (07) :1135-1138
[8]   DEVELOPMENT OF LASER PLASMA ABLATION-DEPOSITION TECHNIQUES FOR CARBON STRIPPER FOILS [J].
DOLLINGER, G ;
MAIERKOMOR, P .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1991, 303 (01) :50-58
[9]   HEAVY-ION BACKSCATTERING SPECTROMETRY (HIBS) - AN IMPROVED TECHNIQUE FOR TRACE-ELEMENT DETECTION [J].
DOYLE, BL ;
KNAPP, JA ;
BULLER, DL .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 42 (02) :295-297
[10]   STICKING OF SPUTTERED PARTICLES TO DIFFERENT SURFACES [J].
EMMOTH, B ;
BERGSAKER, H .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :435-437
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