Thermally stable photoreactive polymers as a color filter resist bearing acrylate and cinnamate double bonds

被引:9
作者
Cho, Seung Hyun [2 ]
Lim, Hyun Soon [1 ]
Jeon, Byung Kuk [1 ]
Ko, Jung Min [1 ]
Lee, Jun Young [1 ]
Kim, Whan Gun [3 ]
机构
[1] Sungkyunkwan Univ, Dept Chem Engn, Suwon 440746, South Korea
[2] Sungkyunkwan Univ, Polymer Technol Inst, Suwon 440746, South Korea
[3] Seokyeong Univ, Dept Appl Chem, Seoul 136704, South Korea
关键词
photoreactive polymer; photocure kinetics; photolithographic micropattern; thermal stability; optical transmittance;
D O I
10.1007/BF03218957
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Photoreactive polymers as a color filter resist containing both photoreactive acrylate and cinnamate double bonds were synthesized usin two step reactions. The chemical structures of the synthesized polymers were confirmed by H-1-NMR and FT-IR spectroscopy. The photoreactive polymers were quite soluble in most common organic solvents and produced excellent quality thin films by spin-coating. The photocuring kinetics of the acrylate and cinnamate double bonds were examined by FT-IR and UV-Vis spectroscopy, which confirmed the excellent photoreactivity of both the acrylate and cinnamate double bonds in the polymers. Upon UV irradiation, photocuring was almost completed within approximately 5 min, irrespective of the type of the prepolymers. The polymers also exhibited superior thermal stability, showing little change in transmittance in the visible region even after heating to 250 degrees C for one hour. Photolithographic micropattems could be obtained with a resolution of a few microns.
引用
收藏
页码:31 / 35
页数:5
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