Optical constants of graphene measured by spectroscopic ellipsometry

被引：374

作者：

Weber, J. W. ^{[1
]}

Calado, V. E. ^{[2
]}

van de Sanden, M. C. M. ^{[1
]}

机构：

[1] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

[2] Delft Univ Technol, Dept Appl Phys, NL-2628 CJ Delft, Netherlands

来源：

APPLIED PHYSICS LETTERS | 2010年 / 97卷 / 09期

关键词：

D O I：

10.1063/1.3475393

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A mechanically exfoliated graphene flake (similar to 150 X 380,mu m(2)) on a silicon, wafer with 98 nm silicon dioxide on top was scanned with a spectroscopic ellipsometer with a focused spot (similar to 100 X 55 mu m(2)) at an angle of 55 degrees. The spectroscopic ellipsometric data were analyzed with an optical model in which the optical constants were parameterized by B-splines. This parameterization is the key for the simultaneous accurate determination of the optical constants in the wavelength range 210-1000 nm and the thickness of graphene, which was found to be 3.4 angstrom. (C) 2010 American Institute of Physics. [doi:10.1063/1.3475393]

引用

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