Growth of mm-long carbon nanotubes by grid-inserted plasma-enhanced chemical vapor deposition
被引:9
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作者:
Kishimoto, S
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机构:
Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, JapanNagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
Kishimoto, S
[1
]
Kojima, Y
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机构:Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
Kojima, Y
Ohno, Y
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机构:Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
Ohno, Y
Sugai, T
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机构:Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
Sugai, T
Shinohara, H
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机构:Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
Shinohara, H
Mizutani, T
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机构:Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
Mizutani, T
机构:
[1] Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
[2] Nagoya Univ, Dept Chem, Nagoya, Aichi 4648602, Japan
来源:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
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2005年
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44卷
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4A期
关键词:
long nanotube;
plasma-enhanced chemical vapor deposition;
grid-inserted plasma CVD;
double-layer catalyst;
thermo-gravimetric analysis;
D O I:
10.1143/JJAP.44.1554
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
Vertically aligned long multi-walled carbon nanotubes (MWNTs) have been successfully grown by grid-inserted plasma-enhanced chemical vapor deposition (PECVD). A thin Fe (1 nm)/Ti (1 nm) double-layer catalyst was effective in growing the long MWNTs. The length of the MWNTs increased to I mm for the growth time of 120 min without growth termination. A thick Fe catalyst or thick Ti underlayer resulted in a low growth rate. Transmission electron microscopy, energy-dispersive X-ray analysis and thermo-gravimetric analysis (TGA) measurements suggest that the MWNTs were grown in a root growth mode. Moreover, the TGA measurements suggest that MWNTs of high quality/purity were successfully grown by grid-inserted PECVD with a double-layer catalyst.