Growth of mm-long carbon nanotubes by grid-inserted plasma-enhanced chemical vapor deposition

被引:9
|
作者
Kishimoto, S [1 ]
Kojima, Y
Ohno, Y
Sugai, T
Shinohara, H
Mizutani, T
机构
[1] Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
[2] Nagoya Univ, Dept Chem, Nagoya, Aichi 4648602, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 4A期
关键词
long nanotube; plasma-enhanced chemical vapor deposition; grid-inserted plasma CVD; double-layer catalyst; thermo-gravimetric analysis;
D O I
10.1143/JJAP.44.1554
中图分类号
O59 [应用物理学];
学科分类号
摘要
Vertically aligned long multi-walled carbon nanotubes (MWNTs) have been successfully grown by grid-inserted plasma-enhanced chemical vapor deposition (PECVD). A thin Fe (1 nm)/Ti (1 nm) double-layer catalyst was effective in growing the long MWNTs. The length of the MWNTs increased to I mm for the growth time of 120 min without growth termination. A thick Fe catalyst or thick Ti underlayer resulted in a low growth rate. Transmission electron microscopy, energy-dispersive X-ray analysis and thermo-gravimetric analysis (TGA) measurements suggest that the MWNTs were grown in a root growth mode. Moreover, the TGA measurements suggest that MWNTs of high quality/purity were successfully grown by grid-inserted PECVD with a double-layer catalyst.
引用
收藏
页码:1554 / 1557
页数:4
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