Growth of mm-long carbon nanotubes by grid-inserted plasma-enhanced chemical vapor deposition

被引：9

作者：

Kishimoto, S ^{[1
]}

Kojima, Y

Ohno, Y

Sugai, T

Shinohara, H

Mizutani, T

机构：

[1] Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan

[2] Nagoya Univ, Dept Chem, Nagoya, Aichi 4648602, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 4A期

关键词：

long nanotube; plasma-enhanced chemical vapor deposition; grid-inserted plasma CVD; double-layer catalyst; thermo-gravimetric analysis;

D O I：

10.1143/JJAP.44.1554

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Vertically aligned long multi-walled carbon nanotubes (MWNTs) have been successfully grown by grid-inserted plasma-enhanced chemical vapor deposition (PECVD). A thin Fe (1 nm)/Ti (1 nm) double-layer catalyst was effective in growing the long MWNTs. The length of the MWNTs increased to I mm for the growth time of 120 min without growth termination. A thick Fe catalyst or thick Ti underlayer resulted in a low growth rate. Transmission electron microscopy, energy-dispersive X-ray analysis and thermo-gravimetric analysis (TGA) measurements suggest that the MWNTs were grown in a root growth mode. Moreover, the TGA measurements suggest that MWNTs of high quality/purity were successfully grown by grid-inserted PECVD with a double-layer catalyst.

引用

页码：1554 / 1557

页数：4