Study of minority carrier traps in p-GaN gate HEMT by optical deep level transient spectroscopy

被引:13
作者
Chen, Jiaxiang [1 ,2 ,3 ]
Huang, Wei [4 ]
Qu, Haolan [1 ,2 ,3 ]
Zhang, Yu [1 ,2 ,3 ]
Zhou, Jianjun [5 ]
Chen, Baile [1 ]
Zou, Xinbo [1 ,6 ]
机构
[1] ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
[3] Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
[4] Fudan Univ, Sch Microelect, Shanghai 200433, Peoples R China
[5] Nanjing Elect Devices Inst, Sci & Technol Monolith Integrated Circuits & Modul, 524 East Zhongshan Rd, Nanjing 210016, Peoples R China
[6] Shanghai Engn Res Ctr Energy Efficient & Custom AI, Shanghai 200031, Peoples R China
基金
中国国家自然科学基金; 上海市自然科学基金;
关键词
THRESHOLD VOLTAGE INSTABILITY; GAN/ALGAN/GAN; DEGRADATION; KINETICS; CHANNEL; LAYER;
D O I
10.1063/5.0083362
中图分类号
O59 [应用物理学];
学科分类号
摘要
Properties of minority carrier (electron) traps in Schottky type p-GaN gate high electron mobility transistors were explicitly investigated by optical deep level transient spectroscopy (ODLTS). By temperature-scanning ODLTS, three electron traps, namely, E1, E2, and E3, were revealed, together with activation energy, capture cross section, and trap concentration. A thermally accelerated electron-releasing process of traps was quantitatively studied by Laplace ODLTS with individual emission time constant disclosed. At 300 K, the emission time constant was determined to be 0.21 and 1.40 s for E2 and E3, respectively, which adjacently existed in the bandgap and held activation energies of over 0.6 eV. As varying the optical injection pulse duration, a three-dimensional mapping of capacitance transient was obtained for each trap, attesting to the electron capture capability of each trap. By varying the reverse bias, the analysis of the ODLTS signal amplitude indicates that all three electron traps are located inside the p-GaN layer rather than the surface defect related. Published under an exclusive license by AIP Publishing.
引用
收藏
页数:6
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