Geometrical Optimization of Resonant Cantilevers Vibrating in In-Plane Flexural Modes

被引：8

作者：

Beardslee, Luke A. ^{[1
]}

Addous, Assim M. ^{[1
]}

Demirci, Kemal S. ^{[1
]}

Brand, Oliver ^{[1
]}

Heinrich, Stephen M. ^{[3
]}

Josse, Fabien ^{[2
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

[2] Marquette Univ, Dept Elect & Comp Engn, Milwaukee, WI 53233 USA

[3] Marquette Univ, Dept Civil & Environm Engn, Milwaukee, WI 53233 USA

来源：

2010 IEEE SENSORS | 2010年

基金：

美国国家科学基金会;

关键词：

SYSTEMS; CHIP;

D O I：

10.1109/ICSENS.2010.5689930

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode has been investigated in air and water. Compared to cantilevers vibrating in their out-of-plane flexural mode, utilizing the in-plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality factors as high as 4,300 in air and 67 in water have been measured for cantilevers with a 12 mu m thick silicon layer. This is in comparison to Q-factors up to 1,500 in air and up to 20 in water for cantilevers vibrating in their fundamental out-of-plane bending mode. Based on the experimental data, design guidelines are established for beam dimensions that ensure maximal Q-factors and minimal mass loading by the surrounding fluid.

引用

页码：1996 / 1999

页数：4

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