Gas sensing by SnO2 thin films prepared by large-area pulsed laser deposition

被引：23
|
作者：
Preiss, Elisabeth M. [1 ]
Rogge, Tobias [1 ]
Krauss, Andreas [1 ]
Seidel, Helmut [2 ]
机构：
[1] Robert Bosch GmbH, D-70465 Stuttgart, Germany
[2] Univ Saarland, Lab Micomech Microfluid Microactuators, D-66123 Saarbrucken, Germany
来源：
EUROSENSORS 2015 | 2015年 / 120卷
关键词：
pulsed laser deposition; thin film; gas sensor; carbon monoxide; nitrogen dioxide; SENSORS;
D O I：
10.1016/j.proeng.2015.08.572
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We present resistive gas responses of tin oxide thin films prepared by large-area pulsed laser deposition. The influence of the oxygen background pressure during deposition on the sensor response to CO was investigated. Film properties such as resistance, morphology and gas sensing signal of samples deposited under different conditions were examined. Palladium was introduced by sputtering of thin layers and subsequent annealing to increase the stability and response to CO in humid background. The sensor's responses to 5-50 ppm CO and 0.5-1 ppm of NO2 were investigated at different operation temperatures and levels of relative humidity. (C) 2015 The Authors. Published by Elsevier Ltd.
引用
收藏
页码：88 / 91
页数：4
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