Investigation of surface acoustic waves on LiNbO3, quartz, and LiTaO3 by laser probing

被引：44

作者：

Holm, A

Sturzer, Q

Xu, Y

Weigel, R

机构：

[1] TU München, Lehrst. für Hochfrequenztechnik, 80333 München

来源：

MICROELECTRONIC ENGINEERING | 1996年 / 31卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00334-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Laser probing for the investigation of surface acoustic wave (SAW) devices has been established on account of some important advantages. Nondestructive testing and phase preserved imaging of the wave field yield valuable information for evaluation of the material data. In the following, results from high accuracy phase velocity measurements on SAW-cut crystals, e.g. 128 degrees-YX-LiNbO3 and ST-quartz will be presented. Moreover it is shown the detection of leaky surface acoustic waves (LSAW) on 36 degrees-YX-LiTaO3, which is a wave mainly polarized parallel to the surface plane. However, high sensitivity of the measurement system enables the detection of the weak bending perpendicular to the surface.

引用

页码：123 / 127

页数：5

共 7 条

[1]

Anhorn M., 1987, IEEE 1987 Ultrasonics Symposium Proceedings (Cat. No.87CH2492-7), P279

[2] A PHASE SENSITIVE LASER PROBE FOR PULSED SAW MEASUREMENTS [J].

ENGAN, H .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1982, 29 (05) :281-283

[3] PHASE ACCURATE OPTICAL PROBING OF SURFACE ACOUSTIC-WAVE DEVICES [J].

GINTER, A ;

SOLKNER, G .

APPLIED PHYSICS LETTERS, 1990, 56 (23) :2295-2297

[4] OPTICAL MEASUREMENT SYSTEM FOR THE DETERMINATION OF ACOUSTIC PHASE VELOCITIES WITH HIGH-ACCURACY [J].

HOLM, A ;

SOLKNER, G ;

RUILE, W ;

WEIGEL, R .

MICROELECTRONIC ENGINEERING, 1994, 24 (1-4) :317-323

[5]

Kovacs G., 1990, P IEEE ULTR S, P435

[6]

Kushibiki J., 1986, IEEE 1986 Ultrasonics Symposium Proceedings (Cat. No.86CH2375-4), P749

[7] PHASE-PRESERVING IMAGING OF HIGH-FREQUENCY SURFACE ACOUSTIC-WAVE FIELDS [J].

SOLKNER, G ;

GINTER, A ;

GRASSL, HP .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 122 (01) :43-46

← 1 →