Structural, thermal and dielectric properties of low-alkali borosilicate glasses for electronic applications

被引:13
作者
Akkasoglu, Ufuk [1 ]
Sengul, Sevgi [2 ]
Arslan, Ikbal [3 ]
Ozturk, Bunyamin [1 ]
Cicek, Bugra [2 ]
机构
[1] Mat Res & Dev Ctr, Akcoat Adv Chem Coatings, TR-54300 Hendek, Sakarya, Turkey
[2] Yidiz Tech Univ, Dept Met & Mat Engn, TR-34210 Istanbul, Turkey
[3] Yidiz Tech Univ, Dept Chem Engn, TR-34210 Istanbul, Turkey
关键词
TECHNOLOGY; STRENGTH; BEHAVIOR; ALUMINA; SILICON; MATRIX;
D O I
10.1007/s10854-021-06747-z
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Low-alkali borosilicate glasses are widely used in electronic packaging applications due to their low dielectric constant, low dielectric loss and excellent matching of thermal expansion coefficient to silicon. This paper presents information about structural, thermal and dielectric investigations of low-alkali borosilicate glass compositions for potential electronic packaging applications. Different bulk borosilicate glass samples were fabricated by conventional melting and quenching technique followed by powder processing. Total alkali oxide content in the composition was kept at 2-3 wt% to achieve high dielectric performance. The glass structure was investigated by Fourier transform infrared spectroscopy. X-ray diffraction analysis was employed to investigate crystallization behavior. Thermal properties were investigated by a heating microscope as well as a push-rod dilatometer. The dielectric properties were investigated by an impedance analyzer at room temperature. The results indicated that the glass structure connectivity has a significant effect on thermal and dielectric properties. Reduced glass structure connectivity due to the lower amount of tetrahedral BO4 units resulted in decreased bulk density, dielectric constant and characteristic temperatures as well as glass transition temperature (T-g). Sample D is a promising candidate for electronic packaging application due to its excellent matching of thermal expansion coefficient (3.3 ppm/degrees C) to Silicon, relatively low softening point (720 degrees C) and T-g (450 degrees C), low dielectric constant (4.07) and low dielectric loss (0.0029).
引用
收藏
页码:22629 / 22636
页数:8
相关论文
共 48 条
[1]   Effect of alumina on ceramic properties of cordierite glass-ceramic from basalt rock [J].
Abdel-Hameed, Salwa A. M. ;
Bakr, I. M. .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2007, 27 (2-3) :1893-1897
[2]   Synthesis and characterization of cadmium doped lead-borate glasses [J].
Alemi, AA ;
Sedghi, H ;
Mirmohseni, AR ;
Golsanamlu, V .
BULLETIN OF MATERIALS SCIENCE, 2006, 29 (01) :55-58
[3]  
Ardelean I, 2006, J OPTOELECTRON ADV M, V8, P1118
[4]   NMR study of structural changes of alkali borosilicate glasses with heat treatment [J].
Chen, D ;
Miyoshi, H ;
Masui, H ;
Akai, T ;
Yazawa, T .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2004, 345 :104-107
[5]   Characterizations of CaO-B2O3-SiO2 glass-ceramics:: Thermal and electrical properties [J].
Chiang, Chuang-Chung ;
Wang, Sea-Fue ;
Wang, Yuh-Ruey ;
Hsu, Yung-Fu .
JOURNAL OF ALLOYS AND COMPOUNDS, 2008, 461 (1-2) :612-616
[6]  
Dams B., 2013, PATENT APPL PUBLICAT, P1
[7]   B-11 NMR-STUDIES AND STRUCTURAL MODELING OF NA2O-B2O3-SIO2 GLASSES OF HIGH SODA CONTENT [J].
DELL, WJ ;
BRAY, PJ ;
XIAO, SZ .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 58 (01) :1-16
[8]  
Dwivedi B. P., 1992, Indian Journal of Physics, Part A, V66A, P747
[9]  
Dziuban J.A., 2006, BONDING MICROSYSTEM, DOI DOI 10.1007/1-4020-4589-1
[10]  
Hanneborg A., 1991, Journal of Micromechanics and Microengineering, V1, P139, DOI 10.1088/0960-1317/1/3/002