Development of MgO:TiO2 thin films for gas sensor applications

被引：63

作者：

Sertel, Buse Comert ^{[1
,2
]}

Sonmez, Nihan Akin ^{[1
,3
]}

Kaya, Meltem Donmez ^{[1
,2
]}

Ozcelik, Suleyman ^{[4
]}

机构：

[1] Gazi Univ, Photon Applicat & Res Ctr, TR-06500 Ankara, Turkey

[2] Gazi Univ, Dept Adv Technol, TR-06500 Ankara, Turkey

[3] Gazi Univ, Dept Elect & Energy, TR-06374 Ankara, Turkey

[4] Gazi Univ, Dept Phys, TR-06500 Ankara, Turkey

来源：

CERAMICS INTERNATIONAL | 2019年 / 45卷 / 03期

关键词：

Titanium dioxide; Magnesium oxide; Thin film; Sensitivity; Gas sensor; Methane; SENSING PROPERTIES; TEMPERATURE; CR;

D O I：

10.1016/j.ceramint.2018.11.079

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this study, structural, morphological and optical properties, and gas sensor performance of magnesium oxide (MgO) doped titanium dioxide (TiO2) thin films were investigated in detail. Gas sensor metallic patterns were fabricated on Si substrate using traditional photolithographic technique. MgO doped TiO2 thin films were deposited on formed Pt electrode surface by confocal sputtering (co-sputtering) system as the active layer. Thin film characterizations were realized by using secondary ion mass spectroscopy (SIMS), atomic force microscope (AFM) and UV-Vis Spectrometer (UV-Vis). Gas sensing measurements were performed by gas sensing test system against methane gas at working temperature of 300 degrees C. To evaluate deposition and thermal annealing effects on the sensing performance, sensors were tested under gas. The sensitivity and response/recovery time of gas sensors were measured in 1000 ppm. MgO doped TiO2 based sensor at substrate temperature of 100 degrees C has high sensitivity and short response/recovery time.

引用

页码：2917 / 2921

页数：5

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