Measurement of thin coatings in the confocal microscope

被引：15

作者：

Cox, G ^{[1
]}

Sheppard, CJR

机构：

[1] Univ Sydney, Australian Key Ctr Microscopy & Microanal, Sydney, NSW 2006, Australia

[2] Univ Sydney, Sch Phys, Dept Phys Opt, Sydney, NSW 2006, Australia

来源：

MICRON | 2001年 / 32卷 / 07期

关键词：

D O I：

10.1016/S0968-4328(01)00017-8

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The use of the confocal microscope for measurement of the thickness of thin transparent coatings, such as the varnish layer on compact discs, is described. The relationship between true and apparent thickness varies in a non-linear fashion, but intensity profiles show a good correspondence with calculated profiles. This provides the basis of a nomogram for prediction of coating thickness. (C) 2001 Published by Elsevier Science Ltd.

引用

页码：701 / 705

页数：5

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