High-frequency electromechanical resonators based on thin GaTe

被引:16
作者
Chitara, Basant [1 ]
Ya'akobovitz, Assaf [1 ]
机构
[1] Ben Gurion Univ Negev, Dept Mech Engn, Fac Engn Sci, IL-84105 Beer Sheva, Israel
关键词
elastic properties; electromechanical reosonators; Young's modulus; ELASTIC PROPERTIES; LAYER MOS2; GRAPHENE; PIEZOELECTRICITY; PERFORMANCE;
D O I
10.1088/1361-6528/aa897d
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Gallium telluride (GaTe) is a layered material, which exhibits a direct bandgap (similar to 1.65 eV) regardless of its thickness and therefore holds great potential for integration as a core element in stretchable optomechanical and optoelectronic devices. Here, we characterize and demonstrate the elastic properties and electromechanical resonators of suspended thin GaTe nanodrums. We used atomic force microscopy to extract the Young's modulus of GaTe (average value similar to 39 GPa) and to predict the resonance frequencies of suspended GaTe nanodrums of various geometries. Electromechanical resonators fabricated from suspended GaTe revealed fundamental resonance frequencies in the range of 10-25 MHz, which closely match predicted values. Therefore, this study paves the way for creating a new generation of GaTe based nanoelectromechanical devices with a direct bandgap vibrating element, which can serve as optomechanical sensors and actuators.
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页数:7
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