Generation of Silicon Nanostructures by Atmospheric Microplasma Jet: The Role of Hydrogen Admixture

被引：23

作者：

Barwe, Barbara ^{[1
]}

Stein, Adrian ^{[1
]}

Cibulka, Ondrej E. ^{[2
]}

Pelant, Ivan ^{[2
]}

Ghanbaja, Jaafar ^{[3
]}

Belmonte, Thierry ^{[3
]}

Benedikt, Jan ^{[1
]}

机构：

[1] Ruhr Univ Bochum, Inst Expt Phys Coupled Plasma Solid State Syst 2, D-44780 Bochum, Germany

[2] Acad Sci Czech Republic, Inst Phys, Prague 11720, Czech Republic

[3] Nancy Univ, Inst Jean Lamour, Dept Chem & Phys Solids & Surfaces, F-54011 Nancy, France

来源：

PLASMA PROCESSES AND POLYMERS | 2015年 / 12卷 / 02期

关键词：

atmospheric pressure plasmas; HRTEM; microplasmas; photoluminescence; silicon nanocrystals; SURFACE PASSIVATION; PLASMA SYNTHESIS; SI NANOCRYSTALS; PHOTOLUMINESCENCE; NANOPARTICLES; DEPOSITION; REACTOR;

D O I：

10.1002/ppap.201400047

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon nanostructures are synthesized with a DC atmospheric pressure microplasma jet using an Ar/SiH4/H-2 gas mixture. The plasma is characterized by OES and imaged using an EMCCD camera. The effect of hydrogen admixture to the formed structures is studied by transmission electron microscopy. Under specific conditions, crystalline silicon nanoparticles grow in an amorphous matrix investigated by electron energy loss spectroscopy. As-grown silicon nanoparticles are collected in ethanol for dynamic light scattering and photoluminescence measurements. The size distribution peaks at 4nm. The silicon nanocrystals exhibit roomtemperature photoluminescence that peaks at approximate to 415 and approximate to 465 nm.

引用

页码：132 / 140

页数：9

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