Generation of Silicon Nanostructures by Atmospheric Microplasma Jet: The Role of Hydrogen Admixture

被引：22

作者：

Barwe, Barbara ^{[1
]}

Stein, Adrian ^{[1
]}

Cibulka, Ondrej E. ^{[2
]}

Pelant, Ivan ^{[2
]}

Ghanbaja, Jaafar ^{[3
]}

Belmonte, Thierry ^{[3
]}

Benedikt, Jan ^{[1
]}

机构：

[1] Ruhr Univ Bochum, Inst Expt Phys Coupled Plasma Solid State Syst 2, D-44780 Bochum, Germany

[2] Acad Sci Czech Republic, Inst Phys, Prague 11720, Czech Republic

[3] Nancy Univ, Inst Jean Lamour, Dept Chem & Phys Solids & Surfaces, F-54011 Nancy, France

来源：

PLASMA PROCESSES AND POLYMERS | 2015年 / 12卷 / 02期

关键词：

atmospheric pressure plasmas; HRTEM; microplasmas; photoluminescence; silicon nanocrystals; SURFACE PASSIVATION; PLASMA SYNTHESIS; SI NANOCRYSTALS; PHOTOLUMINESCENCE; NANOPARTICLES; DEPOSITION; REACTOR;

D O I：

10.1002/ppap.201400047

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon nanostructures are synthesized with a DC atmospheric pressure microplasma jet using an Ar/SiH4/H-2 gas mixture. The plasma is characterized by OES and imaged using an EMCCD camera. The effect of hydrogen admixture to the formed structures is studied by transmission electron microscopy. Under specific conditions, crystalline silicon nanoparticles grow in an amorphous matrix investigated by electron energy loss spectroscopy. As-grown silicon nanoparticles are collected in ethanol for dynamic light scattering and photoluminescence measurements. The size distribution peaks at 4nm. The silicon nanocrystals exhibit roomtemperature photoluminescence that peaks at approximate to 415 and approximate to 465 nm.

引用

页码：132 / 140

页数：9

共 26 条

[1]

Ahn C.C., 1983, EELS ATLAS REFERENCE

[2] Routes to Achieving High Quantum Yield Luminescence from Gas-Phase-Produced Silicon Nanocrystals [J].

Anthony, Rebecca J. ;

Rowe, David J. ;

Stein, Matthias ;

Yang, Jihua ;

Kortshagen, Uwe .

ADVANCED FUNCTIONAL MATERIALS, 2011, 21 (21) :4042-4046

[3] The application of low-frequency glow discharge to high-rate deposition of a-Si:H [J].

Budaguan, BG ;

Popov, AA ;

Sazonov, AY ;

Bosyakov, MN ;

Grunsky, DI ;

Zhuk, DW .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1998, 227 :39-42

[4] Effect of particle size on the photoluminescence from hydrogen passivated Si nanocrystals in SiO2 [J].

Cheylan, S ;

Elliman, RG .

APPLIED PHYSICS LETTERS, 2001, 78 (13) :1912-1914

[5] Chemical Insight into the Origin of Red and Blue Photoluminescence Arising from Freestanding Silicon Nanocrystals [J].

Dasog, Mita ;

Yang, Zhenyu ;

Regli, Sarah ;

Atkins, Tonya M. ;

Faramus, Angelique ;

Singh, Mani P. ;

Muthuswamy, Elayaraja ;

Kauzlarich, Susan M. ;

Tilley, Richard D. ;

Veinot, Jonathan G. C. .

ACS NANO, 2013, 7 (03) :2676-2685

[6] Identification and control of the origin of photoluminescence from silicon quantum dots [J].

Hao, H. L. ;

Shen, W. Z. .

NANOTECHNOLOGY, 2008, 19 (45)

[7] Mechanochemical synthesis of blue luminescent alkyl/alkenyl-passivated silicon nanoparticles [J].

Heintz, Andrew S. ;

Fink, Mark J. ;

Mitchell, Brian S. .

ADVANCED MATERIALS, 2007, 19 (22) :3984-+

[8]

Khriachtchev L, 2009, SILICON NANOPHOTONICS: BASIC PRINCIPLES, PRESENT STATUS AND PERSPECTIVES, P1

[9] Synthesis of high purity silicon nanoparticles in a low pressure microwave reactor [J].

Knipping, J ;

Wiggers, H ;

Rellinghaus, B ;

Roth, P ;

Konjhodzic, D ;

Meier, C .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2004, 4 (08) :1039-1044

[10] Nonthermal plasma synthesis of semiconductor nanocrystals [J].

Kortshagen, Uwe .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (11)

← 1 2 3 →