Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors

被引：76

作者：

Pruessner, Marcel W. ^{[1
]}

Stievater, Todd H. ^{[1
]}

Rabinovich, William S. ^{[1
]}

机构：

[1] USN, Res Lab, Photon Technol Branch, Washington, DC 20375 USA

来源：

OPTICS LETTERS | 2007年 / 32卷 / 05期

关键词：

D O I：

10.1364/OL.32.000533

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate in-plane microfabricated Fabry-Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit Q =26963, FWHM 0.060 nm, finesse F= 489, free spectral range FSR = 81.7 nm, and DBR mirror reflectance R = 99.4%. Thermo-optic tuning over 6.7 nm is also demonstrated. (c) 2007 Optical Society of America.

引用

页码：533 / 535

页数：3

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