Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors

被引：76
作者：
Pruessner, Marcel W. [1 ]
Stievater, Todd H. [1 ]
Rabinovich, William S. [1 ]
机构：
[1] USN, Res Lab, Photon Technol Branch, Washington, DC 20375 USA
来源：
OPTICS LETTERS | 2007年 / 32卷 / 05期
关键词：
D O I：
10.1364/OL.32.000533
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate in-plane microfabricated Fabry-Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit Q =26963, FWHM 0.060 nm, finesse F= 489, free spectral range FSR = 81.7 nm, and DBR mirror reflectance R = 99.4%. Thermo-optic tuning over 6.7 nm is also demonstrated. (c) 2007 Optical Society of America.
引用
收藏
页码：533 / 535
页数：3
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