Photonic-crystal waveguide structure by pattern-integrated interference lithography

被引：13

作者：

Leibovici, Matthieu C. R. ^{[1
]}

Gaylord, Thomas K. ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

OPTICS LETTERS | 2015年 / 40卷 / 12期

基金：

美国国家科学基金会;

关键词：

HOLOGRAPHIC LITHOGRAPHY; FABRICATION; TEMPLATES; INVERSION; DEFECTS; DEVICES;

D O I：

10.1364/OL.40.002806

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The pattern-integrated interference lithography (PIIL) technique combines multi-beam interference lithography (MBIL) and imaging to produce functional periodic-lattice-based microstructures in a rapid single-exposure step. A photonic-crystal waveguide structure with submicron resolution is designed, fabricated by PIIL, and characterized. Scanning electron and atomic force microscope images are found to be in good qualitative agreement with three-dimensional simulations of the developed photoresist. (C) 2015 Optical Society of America

引用

页码：2806 / 2809

页数：4

共 20 条

[1]

[Anonymous], 2009, Periodic Materials and Interference Lithography

[2] Pattern-integrated interference lithography instrumentation [J].

Burrow, G. M. ;

Leibovici, M. C. R. ;

Kummer, J. W. ;

Gaylord, T. K. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (06)

[3] Pattern-integrated interference lithography: single-exposure fabrication of photonic-crystal structures [J].

Burrow, Guy M. ;

Leibovici, Matthieu C. R. ;

Gaylord, Thomas K. .

APPLIED OPTICS, 2012, 51 (18) :4028-4041

[4] Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures [J].

Burrow, Guy M. ;

Gaylord, Thomas K. .

MICROMACHINES, 2011, 2 (02) :221-257

[5] Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].

Campbell, M ;

Sharp, DN ;

Harrison, MT ;

Denning, RG ;

Turberfield, AJ .

NATURE, 2000, 404 (6773) :53-56

[6] Pattern-integrated interference [J].

Gaylord, Thomas K. ;

Leibovici, Matthieu C. R. ;

Burrow, Guy M. .

APPLIED OPTICS, 2013, 52 (01) :61-72

[7] Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks [J].

Jeon, S ;

Park, JU ;

Cirelli, R ;

Yang, S ;

Heitzman, CE ;

Braun, PV ;

Kenis, PJA ;

Rogers, JA .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2004, 101 (34) :12428-12433

[8] Infiltration and inversion of holographically defined polymer photonic crystal templates by atomic layer deposition [J].

King, Jeffrey S. ;

Graugnard, Elton ;

Roche, Olivia M. ;

Sharp, David N. ;

Scrimgeour, Jan ;

Denning, Robert G. ;

Turberfield, Andrew J. ;

Summers, Christopher J. .

ADVANCED MATERIALS, 2006, 18 (12) :1561-+

[9] Embedding multiple nondiffracting defect sites in periodic lattice wavefield by optical phase engineering [J].

Kumar, Manish ;

Joseph, Joby .

JOURNAL OF NANOPHOTONICS, 2014, 8

[10] Custom-modified three-dimensional periodic microstructures by pattern-integrated interference lithography [J].

Leibovici, Matthieu C. R. ;

Gaylord, Thomas K. .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2014, 31 (07) :1515-1519

← 1 2 →