Process control for plasma processing of polymers

被引：48

作者：

Favia, P ^{[1
]}

Creatore, M ^{[1
]}

Palumbo, F ^{[1
]}

Colaprico, V ^{[1
]}

d'Agostino, R ^{[1
]}

机构：

[1] Univ Bari, Dipartimento Chim, Ctr Studio Chim Plasmi, CNR, I-70126 Bari, Italy

来源：

SURFACE & COATINGS TECHNOLOGY | 2001年 / 142卷

关键词：

plasma polymers; process control; plasma treatments; actinometry; surface analysis;

D O I：

10.1016/S0257-8972(01)01191-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

PE-CVD processes of a variety of coatings - fluoropolymers, SiOx, PEO- and Ag-PEO-like, -COOH functional layers - are described, as well as plasma treatments aimed to selectively graft -NH2 groups on polymers, with the use of spectroscopic plasma- and surface-diagnostics parameters of potential use for process transfer and control in industrial applications. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 6

页数：6

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[2]

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[3]

2-G

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