Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution

被引：83

作者：

Brewer, Courtney A. ^{[1
]}

Brizuela, Fernando ^{[1
]}

Wachulak, Przemyslaw ^{[1
]}

Martz, Dale H. ^{[1
]}

Chao, Weilun ^{[2
]}

Anderson, Erik H. ^{[2
]}

Attwood, David T. ^{[2
]}

Vinogradov, Alexander V. ^{[3
]}

Artyukov, Igor A. ^{[3
]}

Ponomareko, Alexander G. ^{[4
]}

Kondratenko, Valeriy V. ^{[4
]}

Marconi, Mario C. ^{[1
]}

Rocca, Jorge J. ^{[1
]}

Menonil, Carmen S. ^{[1
]}

机构：

[1] Colorado State Univ, Natl Sci Res Fdn Engn Res Ctr Extreme Ultraviolet, Ft Collins, CO 80523 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Natl Sci Fdn Engn Res Ctr Extreme Ultraviolet Sci, Berkeley, CA 94720 USA

[3] PN Lebedev Phys Inst, Moscow 119991, Russia

[4] Natl Technol Univ Kharkov Polytech Inst, UA-61002 Kharkov, Ukraine

来源：

OPTICS LETTERS | 2008年 / 33卷 / 05期

关键词：

D O I：

10.1364/OL.33.000518

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanatubes were obtained with a single similar to 1 ns duration pulse from a desktop-size 46.9 run laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures. (c) 2008 Optical Society of America.

引用

页码：518 / 520

页数：3

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