Highly sensitive thermopile heat power sensor for micro-fluid calorimetry of biochemical processes

被引：55

作者：

Baier, V

Födisch, R

Ihring, A

Kessler, E

Lerchner, J

Wolf, G

Köhler, JM

Nietzsch, M

Krügel, M

机构：

[1] Inst Phys High Technol, Micro Syst Div Thermal Microsensors, D-07702 Jena, Germany

[2] TU Bergakad Freiberg, Freiburg, Germany

[3] Tech Univ Ilmenau, D-98684 Ilmenau, Germany

[4] Eurotron Gesell Wiss Geratebau mbH, Leipzig, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 123-24卷

关键词：

nano calorimetry; enzyme catalyzed reaction; thermopile heat power sensor;

D O I：

10.1016/j.sna.2005.05.018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro-fluid chip calorimeter measuring system with highly stable thermostat (0.1 mK) was developed based on an improved nano calorimetry thin-film thermopile chip with excellent chemical and mechanical reliability fabricated in SU-8 technology for insulation and passivation layers. Biochemical processes (e.g. enzyme catalyzed reaction) can be investigated with heat power detection limit <100 nW. (C) 2005 Elsevier B.V. All rights reserved.

引用

收藏

页码：354 / 359

页数：6

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