Influence of asymmetric etching on ion track shapes in polycarbonate

被引：15

作者：

Clochard, M. -C. ^{[1
]}

Wade, T. L. ^{[1
]}

Wegrowe, J. -E. ^{[1
]}

Balanzat, E. ^{[2
]}

机构：

[1] Ecole Polytech, CEA, DSM,Lab Solides Irradies, CNRS, F-91128 Palaiseau, France

[2] CEA CNRS ENSICAEN, Unite Mixte, CIRIL, F-14070 Caen 5, France

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2007年 / 265卷 / 01期

关键词：

conical pores; track-etched membranes; electrodeposition;

D O I：

10.1016/j.nimb.2007.08.065

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

By combining low-energy ion irradiation with asymmetric etching, conical nanopores of controlled geometry can be etched in polycarbonate (PC). Cone bases vary from 0.5 to 1 mu m. Top diameters down to 17 nm are reached. When etching from one side, the pH on the other side (bathed in neutral or acidic buffer) was monitored. Etching temperature ranged from 65 degrees C to 80 degrees C. Pore shape characterization was achieved by electro replication combined with SEM observation. The tip shape depended on whether an acidic buffer was used or not on the stopped side. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：325 / 329

页数：5

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