Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPP, angular sensor

被引：12

作者：

Chiu, Ming-Hung ^{[1
]}

Shih, Bo-Yuan ^{[1
]}

Lai, Chih-Wen ^{[1
]}

Shyu, Lih-Horng ^{[1
]}

Wu, Tsung-Hsien ^{[2
]}

机构：

[1] Natl Formosa Univ, Dept Electroopt Engn, Huwei Yunlin 632, Taiwan

[2] Kao Fong Coll, Digital Content Dept, Chung Ji 908, Pingtung, Taiwan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 141卷 / 01期

关键词：

surface plasmon resonance (SPR); small distance measurement; heterodyne interferometry;

D O I：

10.1016/j.sna.2007.07.032

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Small absolute distance measurement with nanometer resolution based on geometrical optics and the use of a surface plasmon resonance (SPR) sensor is presented. A Zeeman laser with two orthogonal polarizations is used, and a mirror is placed at the back focal plane of an objective lens. As the mirror or the objective lens undergoes a small displacement, the beam will converge or diverge into a SPR sensor, and the induced phase difference between the two marginal rays of the beam measured using a photodiode array and a lock-in amplifier is proportional to the departure of the mirror from the focal plane. Hence, the small absolute distance can be obtained in real-time. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：217 / 223

页数：7

共 12 条

[1] Measurement of wavelength shift by using surface plasmon resonance heterodyne interferometry [J].