Highly sensitive hydrogen sensors based on co-sputtered platinum-activated tungsten oxide films

被引：73

作者：

Zhang, Chao ^{[1
]}

Boudiba, Abdelhamid ^{[1
]}

Navio, Cristina ^{[2
]}

Bittencourt, Carla ^{[2
]}

Olivier, Marie-Georges ^{[1
]}

Snyders, Rony ^{[2
,3
]}

Debliquy, Marc ^{[1
]}

机构：

[1] Univ Mons, Fac Polytech, Serv Sci Mat, B-7000 Mons, Belgium

[2] Univ Mons, CIRMAP, B-7000 Mons, Belgium

[3] Mat Nova Res Ctr, B-7000 Mons, Belgium

来源：

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY | 2011年 / 36卷 / 01期

关键词：

Hydrogen sensor; Metal oxide gas sensor; Radio frequency sputtering; Platinum-activated tungsten oxide film; SENSING CHARACTERISTICS; WO3;

D O I：

10.1016/j.ijhydene.2010.10.011

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Platinum-activated tungsten oxide (Pt-WO3) films for highly sensitive hydrogen (H-2) sensors were co-deposited using radio frequency (r.f.) sputtering with subsequent two-step heat treatments. The Pt-WOx films were annealed at 700 degrees C for 1 h and then thermally treated at 450 degrees C for 24 h or 48 h. The microstructure, crystalline phase and composition of the as-sputtered, annealed and thermally treated films were characterized with scanning electron microscopy, X-ray diffraction and X-ray photoelectron spectroscopy. The sensors were tested for 30-200 ppm H-2 in air at different temperatures from 95 to 220 degrees C and with a relative humidity from 0 to 75%. The influences of Pt concentration and thermal treatment on the microstructure and the sensing performances of the Pt-WO3 films are presented in this work. (C) 2010 Professor T. Nejat Veziroglu. Published by Elsevier Ltd. All rights reserved.

引用

页码：1107 / 1114

页数：8

共 21 条

[1] Optical hydrogen sensitivity of noble metal-tungsten oxide composite films prepared by sputtering deposition [J].

Ando, M ;

Chabicovsky, R ;

Haruta, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 76 (1-3) :13-17

[2] Metal oxide hydrogen, oxygen, and carbon monoxide sensors for hydrogen setups and cells [J].

Aroutiounian, Vladimir .

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2007, 32 (09) :1145-1158

[3] WO3 films modified with functionalised multi-wall carbon nanotubes:: Morphological, compositional and gas response studies [J].

Bittencourt, C ;

Felten, A ;

Espinosa, EH ;

Ionescu, R ;

Llobet, E ;

Corteig, X ;

Pireaux, JJ .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 115 (01) :33-41

[4] High-resolution photoelectron spectroscopy studies on WO3 films modified by Ag addition [J].

Bittencourt, C ;

Felten, A ;

Mirabella, F ;

Ivanov, P ;

Llobet, E ;

Silva, MAP ;

Nunes, LAO ;

Pireaux, JJ .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2005, 17 (43) :6813-6822

[5]

BITTENCOURT C, 2004, J PHYS D, V37, P3389

[6] Reliability of commercially available hydrogen sensors for detection of hydrogen at critical concentrations: Part II - selected sensor test results [J].

Boon-Brett, L. ;

Bousek, J. ;

Moretto, P. .

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2009, 34 (01) :562-571

[7] An overview of hydrogen safety sensors and requirements [J].

Buttner, William J. ;

Post, Matthew B. ;

Burgess, Robert ;

Rivkin, Carl .

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2011, 36 (03) :2462-2470

[8] Comprehensive investigation on planar type of Pd-GaN hydrogen sensors [J].

Chiu, Shao-Yen ;

Huang, Hsuan-Wei ;

Huang, Tze-Hsuan ;

Liang, Kun-Chieh ;

Liu, Kang-Ping ;

Tsai, Jung-Hui ;

Lour, Wen-Shiung .

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2009, 34 (13) :5604-5615

[9] X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF NONSTOICHIOMETRIC TUNGSTEN-OXIDES [J].

DEANGELIS, BA ;

SCHIAVELLO, M .

JOURNAL OF SOLID STATE CHEMISTRY, 1977, 21 (01) :67-72

[10] Pd doped WO3 films prepared by sol-gel process for hydrogen sensing [J].

Fardindoost, Somayeh ;

Zad, Azam Iraji ;

Rahimi, Fereshteh ;

Ghasempour, Roghayeh .

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2010, 35 (02) :854-860

← 1 2 3 →