Advanced laser processing of glass materials

被引：1

作者：

Sugioka, K ^{[1
]}

Obata, K ^{[1
]}

Cheng, Y ^{[1
]}

Midorikawa, K ^{[1
]}

机构：

[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan

来源：

LASER PROCESSING OF ADVANCED MATERIALS AND LASER MICROTECHNOLOGIES | 2003年 / 5121卷

关键词：

fused silica; glass; micromachining; internal modification; ablation; multiwavelength excitation; laser-induced plasma; 3D microstructure; F-2; laser; femtosecond laser;

D O I：

10.1117/12.515607

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Three kinds of advanced technologies using lasers for glass microprocessing are reviewed. Simultaneous irradiation of vacuum ultraviolet (VUV) laser beam, which possesses extremely small laser fluence, with ultraviolet (UV) laser achieves enhanced high surface and edge quality ablation in fused silica and other hard materials with little debris deposition as well as high-speed and high-efficiency refractive index modification of fused silica (VUV-UV multiwavelength excitation processing). Metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials, resulting in surface microstructuring, high-speed holes drilling, crack-free marking, color marking, painting and metal interconnection for the various kinds of glass materials (laser-induced plasma-assisted ablation (LEPAA)). In the meanwhile, a nature of multiphoton absorption of femtosecond laser by transparent materials realizes fabrication of true three-dimensional microstructures embedded in photosensitive glass.

引用

页码：232 / 242

页数：11

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