Study on nano-machining process using mechanism of a friction force microscope

被引：35
作者：
Ashida, K
Morita, N
Yoshida, Y
机构：
[1] MITI, AIST, Mech Engn Lab, Tsukuba, Ibaraki 3058564, Japan
[2] Chiba Univ, Dept Elect & Mech Engn, Inage Ku, Chiba 2638522, Japan
来源：
JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING | 2001年 / 44卷 / 01期
关键词：
FFM; AFM; nano-machining process; single point cutting; microcantilever for processing; cutting force measurement; wear of cutting edge; cutting chip; single crystal silicon;
D O I：
10.1299/jsmec.44.244
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nano-machining experiments are necessary in order to quantitatively understand the nano-machining process. A unique nano-machining and measurement FFM system, which has a stiff cantilever for processing, has been developed. The system can machine hard material with the removal bit size of 1 - 100 nm. The experimental results revealed tw key characteristics of nano-machining. Firstly, the shape of the trace varies because of the irregularity of the tip shape and the wear of the cutting edge. Secondly, the depth of the trace processed by using area scanning is about 10 times as large as that by linear scanning. To explain this, a model of the processing was proposed, in which the removal efficiency is raised by feeding the scanning line. Measurements of variations of the horizontal forces and the shape of the cutting chips verified the model.
引用
收藏
页码：244 / 253
页数：10
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