Selective metallization on insulator surfaces with femtosecond laser pulses

被引：61

作者：

Xu, Jian

Liao, Yang

Zeng, Huidan

Zhou, Zenghui

Sun, Haiyi

Song, Juan

Wang, Xinshun

Cheng, Ya

Xu, Zhizhan

Sugioka, Koji

Midorikawa, Katsumi

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

[3] E China Univ Sci & Technol, Sch Mat Sci & Engn, Key Lab Ultrafine Mat, Minist Educ, Shanghai 200237, Peoples R China

[4] RIKEN, Wako, Saitama 3510198, Japan

来源：

OPTICS EXPRESS | 2007年 / 15卷 / 20期

关键词：

D O I：

10.1364/OE.15.012743

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report selective metallization on surfaces of insulators ( glass slides and lithium niobate crystal) based on femtosecond laser modification combined with electroless plating. The process is mainly composed of four steps: (1) formation of silver nitrate thin films on the surfaces of glass or crystal substrates; (2) generation of silver particles in the irradiated area by femtosecond laser direct writing; (3) removal of unirradiated silver nitrate films; and (4) selective electroless plating in the modified area. We discuss the mechanism of selective metallization on the insulators. Moreover, we investigate the electrical and adhesive properties of the copper microstructures patterned on the insulator surfaces, showing great potential of integrating electrical functions into lab-on-a-chip devices. (C) 2007 Optical Society of America.

引用

页码：12743 / 12748

页数：6

共 28 条

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