Selective metallization on insulator surfaces with femtosecond laser pulses

被引:61
作者
Xu, Jian
Liao, Yang
Zeng, Huidan
Zhou, Zenghui
Sun, Haiyi
Song, Juan
Wang, Xinshun
Cheng, Ya
Xu, Zhizhan
Sugioka, Koji
Midorikawa, Katsumi
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
[3] E China Univ Sci & Technol, Sch Mat Sci & Engn, Key Lab Ultrafine Mat, Minist Educ, Shanghai 200237, Peoples R China
[4] RIKEN, Wako, Saitama 3510198, Japan
关键词
D O I
10.1364/OE.15.012743
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report selective metallization on surfaces of insulators ( glass slides and lithium niobate crystal) based on femtosecond laser modification combined with electroless plating. The process is mainly composed of four steps: (1) formation of silver nitrate thin films on the surfaces of glass or crystal substrates; (2) generation of silver particles in the irradiated area by femtosecond laser direct writing; (3) removal of unirradiated silver nitrate films; and (4) selective electroless plating in the modified area. We discuss the mechanism of selective metallization on the insulators. Moreover, we investigate the electrical and adhesive properties of the copper microstructures patterned on the insulator surfaces, showing great potential of integrating electrical functions into lab-on-a-chip devices. (C) 2007 Optical Society of America.
引用
收藏
页码:12743 / 12748
页数:6
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