Undoped tin oxide thin films obtained by the sol gel technique, starting from a simple precursor solution

被引:21
作者
Torres Martinez, D. Y. [1 ]
Castanedo Perez, R. [1 ]
Torres Delgado, G. [1 ]
Zelaya Angel, O. [2 ]
机构
[1] Inst Politecn Nacl, Ctr Invest & Estudios Avanzados, Unidad Queretaro, Queretaro 76001, Qro, Mexico
[2] Inst Politecn Nacl, Dept Fis, Ctr Invest & Estudios Avanzados, Mexico City 07000, DF, Mexico
关键词
ANNEALING TEMPERATURE; OPTICAL-PROPERTIES; SNO2; TRANSPARENT; DEPOSITION; SENSORS; SB;
D O I
10.1007/s10854-010-0196-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we report the synthesis and the structural, optical and electrical properties of undoped tin oxide thin films obtained by the sol-gel technique. The films have been prepared from a simpler precursor solution than other ones reported; it is based on stannous chloride (SnCl2 center dot 2H(2)O), ethanol, glycerol and triethylamine. The films are deposited on glass slide substrates and sintered at temperatures in the 300-550 A degrees C range, in an open atmosphere. A second thermal treatment in vacuum is made in order to decrease the resistivity of the films. The X-ray diffraction patterns show the tetragonal phase of SnO2 with a small preferential orientation in the (110) plane. All films show high optical transmission (similar to 85%) and a direct band gap value around of 3.8 eV. The minimum resistivity value, 2 x 10(-1) Ohm-cm, is obtained for the films sintered at 300 and 350 A degrees C and thermal treated in vacuum at 500 A degrees C for 1 h. The decrease of the resistivity with the thermal treatment in vacuum is associated with an increase in the oxygen vacancies concentration.
引用
收藏
页码:684 / 689
页数:6
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