Double nanoplate-based NEMS under hydrostatic and electrostatic actuations

Presented herein is a comprehensive investigation on the nonlinear vibration behavior of nanoplate-based nano electromechanical systems (NEMS) under hydrostatic and electrostatic actuations based on nonlocal elasticity and Gurtin-Murdoch theory. Using nonlinear strain-displacement relations, the geometrical nonlinearity is modeled. Based on Kelvin-Voigt model, the influence of the viscoelastic coefficient is also discussed. Nonlocal plate theory and Hamilton's principle are utilized for deriving the governing equations. Furthermore, the differential quadrature method (DQM) is employed to compute the nonlinear frequency. In addition, pull-in voltage and hydrostatic pressure are considered by comparing the results obtained from nanoplates made of two different materials including aluminum (Al) and silicon (Si). Finally, the influences of important parameters including the small scale, thickness of the nanoplate, center gap and Winkler coefficient in the actuated nanoplate are thoroughly studied. The plots for the ratio of nonlinear-to-linear frequencies against thickness, maximum transverse amplitude and non-dimensional center gap of nanoplate are also presented.