Silicon single electron memory cell

被引:68
作者
Stone, NJ [1 ]
Ahmed, H [1 ]
机构
[1] Univ Cambridge, Cavendish Lab, Microelect Res Ctr, Cambridge CB3 0HE, England
关键词
D O I
10.1063/1.122401
中图分类号
O59 [应用物理学];
学科分类号
摘要
A compact single-electron memory cell has been fabricated in silicon using a process that is compatible with complementary metal-oxide-semiconductor circuit fabrication. The device is based on the Coulomb blockade effect observed in highly doped silicon nanowires. The circuit shows clear memory operation with a >100 mV gap between "0" and "1" levels when tested at a temperature of 4.2 K. The response of the circuit to write and erase pulse sequences is also presented. (C) 1998 American Institute of Physics. [S0003-6951(98)02041-5].
引用
收藏
页码:2134 / 2136
页数:3
相关论文
共 7 条
[1]   NANOWRITER - A NEW HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY SYSTEM FOR NANOMETER-SCALE FABRICATION [J].
CHEN, ZW ;
JONES, GAC ;
AHMED, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06) :2009-2013
[2]   A silicon single-electron transistor memory operating at room temperature [J].
Guo, LJ ;
Leobandung, E ;
Chou, SY .
SCIENCE, 1997, 275 (5300) :649-651
[3]   SINGLE-ELECTRON MEMORY [J].
NAKAZATO, K ;
BLAIKIE, RJ ;
AHMED, H .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) :5123-5134
[4]   Gate controlled Coulomb blockade effects in the conduction of a silicon quantum wire [J].
Smith, RA ;
Ahmed, H .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (06) :2699-2703
[5]   Silicon single-electron memory structure [J].
Stone, NJ ;
Ahmed, H .
MICROELECTRONIC ENGINEERING, 1998, 42 :511-514
[6]  
Tiwari S, 1996, APPL PHYS LETT, V68, P1377, DOI 10.1063/1.116085
[7]  
YANO K, 1993, INT ELECT DEVICES M, V93, P541