Development of biofactory-on-a-chip technology using excimer laser micromachining

Multilayer microelectrode structures, with 10 mu m feature sizes, have been fabricated using excimer laser ablation techniques. These structures will be incorporated into devices for the electro-manipulation and characterization of cells, microorganisms and other particles. The AC electrokinetic phenomena of dielectrophoresis, electrorotation and travelling electric field effects are utilized, all of which are dependent on the dielectric properties of the bioparticles. Examples are presented of a travelling wave junction and selective particle trap to be incorporated into a prototype biofactory-on-a-chip device. A technique for profiling the edges of via-holes has been developed to facilitate robust electrical connections through polyimide films in these multilayer devices.