A study of liquid metal alloy ion sources for the production of ions of interest in the microelectronics industry

被引：5

作者：

Ganetsos, T ^{[1
]}

Mair, GLR

Bischoff, L

Teichert, J

Kioussis, D

机构：

[1] Univ Athens, Dept Phys, Sect Solid State Phys, GR-15784 Athens, Greece

[2] Rossendorf Inc, Res Ctr, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany

[3] Univ Athens, Dept Phys, Phys Lab, GR-15784 Athens, Greece

来源：

SOLID-STATE ELECTRONICS | 2001年 / 45卷 / 06期

关键词：

D O I：

10.1016/S0038-1101(01)00164-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This is a comprehensive study of the characteristics of an AuGeSi and CoNd liquid metal alloy ion sources [Focused ion beams from liquid metal ion sources, 1991]. Such characteristics include current-voltage curves and ion beam mass-spectra. A careful investigation has been undertaken where the temperature is one of the main variable experimental parameters. Theoretical models support the experimental results. (C) 2001 Published by Elsevier Science Ltd.

引用

页码：1049 / 1054

页数：6

共 26 条

[1] Temperature dependence of the electric characteristics of liquid metal alloy ion sources [J].

Bischoff, L ;

Teichert, J ;

Ganetsos, T ;

Mair, GLR .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (06) :692-695

[2] Temperature and energy spread investigations of alloy LMIS [J].

Bischoff, L ;

Teichert, J ;

Hausmann, S ;

Ganetsos, T ;

Mair, GLR .

MICROELECTRONIC ENGINEERING, 2000, 53 (1-4) :613-616

[3] Investigation and optimization of the emission parameters of alloy liquid metal ion sources [J].

Bischoff, L ;

Teichert, J ;

Hausmann, S ;

Ganetsos, T ;

Mair, GLR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 161 (161) :1128-1131

[4]

BOJACK MJ, 1989, J MATER SCI, V22, P2421

[5]

BRANDON DG, 1964, SURF SCI, V102, P1

[6] MINIATURE ION SOURCES FOR ANALYTICAL INSTRUMENTS [J].

CLAMPITT, R ;

JEFFERIES, DK .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :739-742

[7]

CROXTON CA, 1980, STAT MECH LIQUID SUR, P161

[8] In situ observation of the tip shape of AuGe liquid alloy ion sources using a high voltage transmission electron microscope [J].

Driesel, W ;

Dietzsch, C ;

Muhle, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (05) :3367-3380

[9] FIELD-EMISSION ION-SOURCE OF MOLECULAR CESIUM IONS [J].

HELM, H ;

MOLLER, R .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1983, 54 (07) :837-840

[10] DEVELOPMENT OF A COBALT LIQUID ALLOY ION-SOURCE [J].

HESSE, E ;

BISCHOFF, L ;

TEICHERT, J .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1994, 27 (02) :427-428

← 1 2 3 →