Design of a magnetic bearing for high speed rotating micro-machines

被引：0

作者：

Wilkinson, SG ^{[1
]}

Mellor, PH ^{[1
]}

Holliday, D ^{[1
]}

机构：

[1] Dept Elect & Elect Engn, Ind Elect Grp, Bristol BS8 1UB, Avon, England

来源：

UPEC 2004: 39th International Universitities Power Engineering Conference, Vols 1-3, Conference Proceedings | 2005年

关键词：

MEMS; micro-machines; magnetic bearing; induction levitation;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This paper describes the design and fabrication of a planar magnetic bearing for use in high speed micro-machines. The proposed planar magnetic bearing relies on induction levitation to provide axial and radial support for the rotor while eliminating contact friction. It is fully compatible with conventional micro-fabrication techniques and requires only two stages of fabrication. The bearing benefits from the inherent vertical stability of repulsive levitation, but requires careful choice of geometrical parameters to optimise the lateral stability.

引用

页码：570 / 574

页数：5

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