Optical characterization of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements

被引：20
作者：
Janicki, Vesna
Sancho-Parramon, Jordi
Stenzel, Olaf
Lappschies, Marc
Goertz, Bjorn
Rickers, Christoph
Polenzky, Christina
Richter, Uwe
机构：
[1] Rudjer Boskovic Inst, Zagreb 10000, Croatia
[2] Fraunhofer Inst Angew Opt & Feinmech, D-07745 Jena, Germany
[3] Laser Zentrum Hannover, D-30419 Hannover, Germany
[4] Fraunhofer Inst Schicht & Oberflachentech, D-38108 Braunschweig, Germany
[5] SENTECH Instrument GmbH, D-12489 Berlin, Germany
来源：
APPLIED OPTICS | 2007年 / 46卷 / 24期
关键词：
D O I：
10.1364/AO.46.006084
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analyzed optically based on spectrophotometric and spectroscopic ellipsometry measurements under different angles of incidence in order to precisely characterize the coatings. The Lorentz-Lorenz model has been used to calculate the refractive index of material mixtures in gradient and constant index layers of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition. (c) 2007 Optical Society of America
引用
收藏
页码：6084 / 6091
页数：8
相关论文
共 21 条
[1]  
BERNING PH, 1963, PHYS THIN FILMS, V1, P69
[2]   A general-purpose software for optical characterization of thin films:: specific features for microelectronic applications [J].
Bosch, S ;
Ferré-Borrull, J ;
Sancho-Parramon, J .
SOLID-STATE ELECTRONICS, 2001, 45 (05) :703-709
[3]   Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances [J].
Bruggeman, DAG .
ANNALEN DER PHYSIK, 1935, 24 (07) :636-664
[4]   CHARACTERIZATION OF INHOMOGENEOUS TRANSPARENT THIN-FILMS ON TRANSPARENT SUBSTRATES BY SPECTROSCOPIC ELLIPSOMETRY - REFRACTIVE-INDEXES N(LAMBDA) OF SOME FLUORIDE COATING MATERIALS [J].
CHINDAUDOM, P ;
VEDAM, K .
APPLIED OPTICS, 1994, 33 (13) :2664-2671
[5]   ESTIMATE OF THE DEGREE OF INHOMOGENEITY OF THE REFRACTIVE-INDEX OF DIELECTRIC FILMS FROM SPECTROSCOPIC ELLIPSOMETRY [J].
DELARIVIERE, GP ;
FRIGERIO, JM ;
RIVORY, J ;
ABELES, F .
APPLIED OPTICS, 1992, 31 (28) :6056-6061
[6]   Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry [J].
Franta, D ;
Ohlídal, I ;
Munzar, D ;
Hora, J ;
Navrátil, K ;
Manfredotti, C ;
Fizzotti, F ;
Vittone, E .
THIN SOLID FILMS, 1999, 343 :295-298
[7]  
Franta D, 2000, SURF INTERFACE ANAL, V30, P574, DOI 10.1002/1096-9918(200008)30:1<574::AID-SIA709>3.0.CO
[8]  
2-U
[9]   Colours in metal glasses and in metallic films. [J].
Garnett, JCM .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL OR PHYSICAL CHARACTER, 1904, 203 :385-420
[10]   Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating [J].
Janicki, V. ;
Gaebler, D. ;
Wilbrandt, S. ;
Leitel, R. ;
Stenzel, O. ;
Kaiser, N. ;
Lappschies, M. ;
Goertz, B. ;
Ristau, D. ;
Rickers, C. ;
Vergoehl, M. .
APPLIED OPTICS, 2006, 45 (30) :7851-7857
123