The role of nitrogen in carbon nanotube formation

被引:83
作者
Lin, CH
Chang, HL
Hsu, CM
Lo, AY
Kuo, CT
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[2] Ind Technol Res Inst, Mat Res Labs, Photoetching Lab, Hsinchu 310, Taiwan
关键词
nitrogen; formation mechanism; bamboo-like nanotubes; chemical vapor deposition;
D O I
10.1016/S0925-9635(03)00209-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
To examine the role of nitrogen, Co- and Ni-coated substrates were pretreated with three different gas compositions to compare the pretreated catalyst surfaces; the Fe, Co and Ni foils were subjected to carbon nanotube (CNT) growth experiments with CH4/H-2 and CH4/N-2 as source gases; the catalyst pretreatment plus the CNT growth experiments on Co- and Ni-coated Si substrates were carried out using both microwave plasma chemical vapor deposition and electron cyclotron resonance chemical vapor deposition (ECR-CVD) under different nitrogen-containing gases. The results show that the role of nitrogen may be summarized as follows: by comparing with hydrogen plasma, the bombardment energy of nitrogen plasma is greater. Therefore, the presence of nitrogen during CNT growth can keep the front catalyst surface clean and active to prolong surface passivation to enhance carbon bulk diffusion. The higher temperature due to higher bombardment energy of nitrogen plasma can promote agglomeration effects during catalyst pretreatment and the initial stage of CNT growth to produce larger size nano-particles. The presence of nitrogen is a favorable condition for formation of the bamboo-like CNTs, but not a necessary condition. Another favorable condition for formation of the bamboo-like CNTs is to deposit CNTs by ECR-CVD. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1851 / 1857
页数:7
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