An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry

被引：12

作者：

Chen, Kun-Huang ^{[1
]}

Chiu, Huang-Sen ^{[2
]}

Chen, Jing-Heng ^{[3
]}

Chen, You-Cheng ^{[1
]}

机构：

[1] Feng Chia Univ, Dept Elect Engn, Taichung 40724, Taiwan

[2] Lunghwa Univ Sci & Technol, Dept Elect Engn, Guishan Shiang 33306, Taoyuan County, Taiwan

[3] Feng Chia Univ, Dept Photon, Taichung 40724, Taiwan

来源：

MEASUREMENT | 2012年 / 45卷 / 06期

关键词：

Polarization angle; Small displacement; Dual-prism; Heterodyne interferometry; NONLINEARITY; BEAM;

D O I：

10.1016/j.measurement.2012.02.028

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This study proposes an optical method for measuring small displacements. In this method, two semispherical prisms are used as test apparatuses. Because testing lights inside the prisms are at polarization angles, the phase difference can be differentially magnified twice and the measurement resolution can be greatly increased. Furthermore, using common-path heterodyne interferometery ensures that this method is simple to implement, high accurate, and high stability against the vibration of the surrounding environment. The capability of this method was demonstrated with a sensitivity of 42.92 degrees/mm and a resolution of 23.29 nm. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：1510 / 1514

页数：5