Research on Multi-domain Unified Modeling and Simulation of a Micro Electro-thermal Actuator

Referring to the natures of nonlinear dynamics and coupled energy domains presented by Micro-Electro-Mechanical Systems (MEMS), a multi energy domain unified simulation language (modelica) based coupled modeling and simulation methodology is put forward. Then by choosing a micro electro-thermal actuator as the example, corresponding multi energy domain unified modeling and simulation processes of such a coupled micro device, which covers mechanical energy domain, electric energy domain and thermal energy domain, show the efficiency and convenience of this advanced modeling method. At last, through simulation result comparison with device level FEA simulation result and experimental result, the maximum relative error between numerical calculation result and experimental result is less than 4.2%. It proves the accuracy of this system level simulation method.