Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

被引：147

作者：

Haider, M

Rose, H

Uhlemann, S

Kabius, B

Urban, K

机构：

[1] Tech Univ Darmstadt, Inst Angew Phys, D-64289 Darmstadt, Germany

[2] CEOS GmbH, D-69120 Heidelberg, Germany

[3] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany

来源：

JOURNAL OF ELECTRON MICROSCOPY | 1998年 / 47卷 / 05期

关键词：

aberration correction; reduction of artefacts; information limit; contrast enhancement; point spread function; high-resolution TEM;

D O I：

10.1093/oxfordjournals.jmicro.a023610

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.

引用

页码：395 / 405

页数：11

共 31 条

[1]

Abbe E., 1910, LEHRE BILDENTSTEHUNG

[2] Maximum-likelihood method for focus-variation image reconstruction in high resolution transmission electron microscopy [J].