Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion

被引:52
作者
Li, Jianping [1 ]
Zhou, Xiaoqin [1 ]
Zhao, Hongwei [1 ]
Shao, Mingkun [1 ]
Fan, Zunqiang [1 ]
Liu, Hui [1 ]
机构
[1] Jilin Univ, Sch Mech Sci & Engn, Changchun 130025, Peoples R China
基金
中国国家自然科学基金;
关键词
FLEXURE; ACTUATOR;
D O I
10.1063/1.4918295
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 mu rad/s and the rotary resolution is about 1.54 mu rad. The working performance confirms the feasibility of the dual-servo nanopositioning stage. (C) 2015 AIP Publishing LLC.
引用
收藏
页数:6
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