Characteristics analysis and dynamic responses of micro-gas-lubricated journal bearings with a new slip model

被引:19
作者
Zhang, Wen-Ming [1 ]
Meng, Guang [1 ]
Huang, Hai [2 ]
Zhou, Jian-Bin [1 ]
Chen, Jie-Yu [1 ]
Chen, Di [3 ]
机构
[1] Shanghai Jiao Tong Univ, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
[2] Shenyang Aero Engine Res Inst, Shenyang 110015, Peoples R China
[3] Shanghai Jiao Tong Univ, Natl Key Lab Micro Nano Fabricat Technol, Shanghai 200030, Peoples R China
关键词
D O I
10.1088/0022-3727/41/15/155305
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper, a new slip model based on kinetic theory of gases for gas-lubricated journal bearings in micro-electro-mechanical systems (MEMS) is applied using a physical approach. The corresponding modified governing equation and mathematic model are presented and the flow rate is plotted versus the inverse Knudsen number. Pressure distributions along the gas bearing at various Knudsen numbers and bearing numbers are plotted and the load carrying capacities are also obtained. A numerical analysis of a rigid rotor supported by gas-lubricated journal bearings is presented for dynamic behaviour. The slip flow effect on the properties, including pressure distribution, load carrying capacity and dynamic coefficients, of the micro-gas-lubricated journal bearings and dynamic responses of the micro rotor-bearing system are estimated and analysed in detail. It is shown that the dynamic coefficients increase with increasing bearing number except for two damping coefficients and the rotor-bearing system runs at a much higher rotating speed to keep stable when slip flow occurs. Moreover, the oscillation period of the rotor operating with the slip model is longer than that with the continuum flow. In addition, the whirl frequency is reduced from 0.422 to 0.079 under the slip effect. Therefore, the results of this study contribute to a further understanding of the characteristics and nonlinear dynamics of gas-film rotor-bearing systems in MEMS.
引用
收藏
页数:16
相关论文
共 32 条
[1]  
[Anonymous], 1994, FUNDAMENTALS FLUID F
[2]  
Bird G.A., 1994, MOL GAS DYNAMICS DIR
[3]   Modal and nodal EHD analysis for gas journal bearings [J].
Boedo, S ;
Booker, JF .
JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 2005, 127 (02) :306-314
[4]  
Burgdorfer A., 1959, ASME J. Basic Eng, V81, P94, DOI [DOI 10.1115/1.4008375, 10.1115/1.4008375]
[5]   Application of modified molecular gas lubrication equation to the analysis of micromotor bushings [J].
Chen, MD ;
Lin, JW ;
Lee, SC ;
Chang, KM ;
Li, WL .
TRIBOLOGY INTERNATIONAL, 2004, 37 (06) :507-513
[6]   ANALYSIS OF ULTRA-THIN GAS FILM LUBRICATION BASED ON LINEARIZED BOLTZMANN-EQUATION .1. DERIVATION OF A GENERALIZED LUBRICATION EQUATION INCLUDING THERMAL CREEP FLOW [J].
FUKUI, S ;
KANEKO, R .
JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1988, 110 (02) :253-262
[7]  
Gad-el-Hak M., 2002, The MEMS Handbook, V2
[8]  
Hsia YT, 1983, ASME J TRIBOL, V81, P94
[9]   Investigations of slip effect on the performance of micro gas bearings and stability of micro rotor-bearing systems [J].
Huang, Hai ;
Meng, Guang ;
Chen, Jieyu .
SENSORS, 2007, 7 (08) :1399-1414
[10]  
Kennard E.H., 1938, KINETIC THEORY GASES