Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics

被引：30

作者：

Fournier, Yannick ^{[1
]}

Maeder, Thomas ^{[1
]}

Boutinard-Rouelle, Gregoire ^{[1
]}

Barras, Aurelie ^{[1
]}

Craquelin, Nicolas ^{[1
]}

Ryser, Peter ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, LPM, CH-1015 Lausanne, Switzerland

来源：

SENSORS | 2010年 / 10卷 / 12期

关键词：

LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting; TEMPERATURE COFIRED CERAMICS; TECHNOLOGY; SENSOR;

D O I：

10.3390/s101211156

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.

引用

页码：11156 / 11173

页数：18

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