Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics

被引:30
作者
Fournier, Yannick [1 ]
Maeder, Thomas [1 ]
Boutinard-Rouelle, Gregoire [1 ]
Barras, Aurelie [1 ]
Craquelin, Nicolas [1 ]
Ryser, Peter [1 ]
机构
[1] Ecole Polytech Fed Lausanne, LPM, CH-1015 Lausanne, Switzerland
关键词
LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting; TEMPERATURE COFIRED CERAMICS; TECHNOLOGY; SENSOR;
D O I
10.3390/s101211156
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.
引用
收藏
页码:11156 / 11173
页数:18
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