Electrical characterization of Pt/SrBi2Ta2O9/Pt capacitors fabricated by the pulsed laser ablated deposition technique

被引：30
作者：
Lee, JK [1 ]
Jung, HJ [1 ]
Auciello, O [1 ]
Kingon, AI [1 ]
机构：
[1] N CAROLINA STATE UNIV, DEPT MAT SCI & ENGN, RALEIGH, NC 27695 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1996年 / 14卷 / 03期
关键词：
D O I：
10.1116/1.580411
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Pulsed laser ablation deposition was used to synthesize polycrystalline SrBi2Ta2O9 layered ferroelectric thin films on the platinized silicon substrate. The surface roughness of the deposited film was an average of 4 nm. The titanium element was diffused to the SrBi2Ta2O9 layer through the platinum layer. P-E hysteresis loop for the Pt/SrBi2Ta2O9/Pt/Ti capacitor was well saturated and symmetric (P-r = 3 mu C/cm(2), E(c) = 25 kV/cm). (C) 1996 American Vacuum Society.
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页码：900 / 904
页数：5
相关论文
共 12 条
  • [1] PREPARATION AND FERROELECTRIC PROPERTIES OF SRBI2TA2O9 THIN-FILMS
    AMANUMA, K
    HASE, T
    MIYASAKA, Y
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (02) : 221 - 223
  • [2] PULSED-LASER ABLATION SYNTHESIS AND CHARACTERIZATION OF LAYERED PT/SRBI2TA2O9/PT FERROELECTRIC CAPACITORS WITH PRACTICALLY NO POLARIZATION FATIGUE
    DAT, R
    LEE, JK
    AUCIELLO, O
    KINGON, AI
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (04) : 572 - 574
  • [3] de Araujo C. A. Paz, 1993, Int. Patent Appl, Patent No. [WO93/12542, 9312542]
  • [4] FATIGUE-FREE FERROELECTRIC CAPACITORS WITH PLATINUM-ELECTRODES
    DEARAUJO, CAP
    CUCHIARO, JD
    MCMILLAN, LD
    SCOTT, MC
    SCOTT, JF
    [J]. NATURE, 1995, 374 (6523) : 627 - 629
  • [5] CHARACTERIZATION OF THIN-FILMS OF BISMUTH OXIDE BY X-RAY PHOTO-ELECTRON SPECTROSCOPY
    DHARMADHIKARI, VS
    SAINKAR, SR
    BADRINARAYAN, S
    GOSWAMI, A
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1982, 25 (2-3) : 181 - 189
  • [6] IMPRINT AND OXYGEN DEFICIENCY IN (PB,LA)(ZR,TI)O-3 THIN-FILM CAPACITORS WITH LA-SR-CO-O ELECTRODES
    LEE, J
    RAMESH, R
    KERAMIDAS, VG
    WARREN, WL
    PIKE, GE
    EVANS, JT
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (11) : 1337 - 1339
  • [7] VOLTAGE OFFSETS IN (PB,LA)(ZR,TI)O-3 THIN-FILMS
    PIKE, GE
    WARREN, WL
    DIMOS, D
    TUTTLE, BA
    RAMESH, R
    LEE, J
    KERAMIDAS, VG
    EVANS, JT
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (04) : 484 - 486
  • [8] RAMESH R, 1994, APPL PHYS LETT, V64, P2517
  • [9] SHIFT AND DEFORMATION OF THE HYSTERESIS CURVE OF FERROELECTRICS BY DEFECTS - ELECTROSTATIC MODEL
    ROBELS, U
    CALDERWOOD, JH
    ARLT, G
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (08) : 4002 - 4008
  • [10] FERROELECTRIC MEMORIES
    SCOTT, JF
    DEARAUJO, CAP
    [J]. SCIENCE, 1989, 246 (4936) : 1400 - 1405
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