Absolutely determined inelastic mean free paths for 300-3000 eV electrons in 10 elemental solids

被引：6

作者：

Nagatomi, T. ^{[1
]}

Tanuma, S. ^{[2
]}

Goto, K. ^{[3
]}

机构：

[1] Osaka Univ, Dept Mat & Life Sci, Grad Sch Engn, Suita, Osaka 5650871, Japan

[2] Natl Inst Mat Sci, Mat Anal Stn, Tsukuba, Ibaraki 3050047, Japan

[3] Natl Inst Adv Ind Sci & Technol AIST Chubu, Moriyama Ku, Nagoya, Aichi 4638560, Japan

来源：

SURFACE AND INTERFACE ANALYSIS | 2010年 / 42卷 / 10-11期

关键词：

inelastic mean free path; surface excitation parameter; electron; ENERGY-LOSS FUNCTIONS; SURFACE EXCITATION PROBABILITY; OXYGEN-ADSORBED SI(111); SPECTROSCOPY; REFLECTION; IMFP; NI; AG; GE; SI;

D O I：

10.1002/sia.3570

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The inelastic mean free path (IMFP), surface excitation parameter (SEP), and differential SEP (DSEP) were determined for 10 elemental solids by the absolute analysis of reflection electron energy loss spectra (REELS). The obtained IMFPs were compared with values calculated using predictive equations for the IMFP, and it is found that the obtained IMFPs show a fairly good agreement with those calculated by the TPP-2M predictive equation. The obtained IMFPs were analyzed by the Fano plot and fitted to the Bethe equation, revealing that the obtained IMFPs are well described by the Bethe equation. The obtained DSEPs were compared with the theoretically calculated DSEPs, and the reasonable agreement between the present and theoretical DSEPs was confirmed. The dependence of the present SEPs on the electron energy is found to be described well by predictive equations for the SEP, and material parameters in the predictive equations were determined. Copyright (C) 2010 John Wiley & Sons, Ltd.

引用

页码：1537 / 1540

页数：4

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