共 22 条
- [11] Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application [J]. JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 2001, 123 (01): : 35 - 43
- [12] Ewins D.J., 1984, Modal Testing: Theory and Practice
- [13] Design and evaluation of a mechanical nanomanufacturing system for nanomilling [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2012, 36 (01): : 19 - 30
- [14] Harris F. J., 1978, P IEEE, P66
- [15] Harvey A., 1993, Application Note, P1
- [16] Hocken R., 2010, CIRP ANN MANUF TECHN, V1
- [19] Modeling of piezo actuator's nonlinear and frequency dependent dynamics [J]. MECHATRONICS, 1999, 9 (04) : 391 - 410
- [20] Modeling of piezoelectric actuator for compensation and controller design [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2003, 27 (01): : 70 - 86