Electrochemistry of copper in aqueous oxalic acid solutions

被引：20
|
作者：
Aksu, S [1 ]
机构：
[1] Suleyman Demirel Univ, Fac Engn & Architecture, Min Engn Dept, Minerals & Mat Proc Grp, TR-32260 Isparta, Turkey
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2005年 / 152卷 / 12期
关键词：
D O I：
10.1149/1.2121737
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Oxalic acid is a complexing agent used in both chemical mechanical planarization (CMP) of copper and post-CMP cleaning. Aqueous solubility diagrams and potential-pH diagrams at different total dissolved copper and oxalic acid activities were derived to examine the electrochemistry of copper in aqueous oxalic acid solutions. The predictions of the diagrams are discussed in terms of the experimental data available in the electrochemistry and Cu CMP literature. Good correlations were found. (c) 2005 The Electrochemical Society. All rights reserved.
引用
收藏
页码：G938 / G943
页数：6
相关论文
共 50 条
  • [1] Electrochemistry of copper in aqueous glycine solutions
    Aksu, S
    Doyle, FM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (01) : B51 - B57
  • [2] Electrochemistry of copper in aqueous ethylenediamine solutions
    Aksu, S
    Doyle, FM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (07) : B340 - B347
  • [3] The electrochemistry of copper in aqueous sulphide solutions
    Smith, J.
    Qin, Z.
    King, F.
    Werme, L.
    Shoesmith, D. W.
    SCIENTIFIC BASIS FOR NUCLEAR WASTE MANAGEMENT XXIX, 2006, 932 : 869 - +
  • [4] On the behaviour of copper in oxalic acid solutions
    Gabrielli, C.
    Beitone, L.
    Mace, C.
    Ostermann, E.
    Perrot, H.
    ELECTROCHIMICA ACTA, 2007, 52 (19) : 6012 - 6022
  • [5] Electrochemistry on microcircuits. II: Copper dendrites in oxalic acid
    Gabrielli, C.
    Beitone, L.
    Mace, C.
    Ostermann, E.
    Perrot, H.
    MICROELECTRONIC ENGINEERING, 2008, 85 (08) : 1686 - 1698
  • [6] The solubility of oxalic acid in aqueous solutions of hydrochloric acid
    Chapin, EM
    Bell, JM
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1931, 53 : 3284 - 3287
  • [7] Ultrasonic degradation of oxalic acid in aqueous solutions
    Duekkanci, M.
    Guenduez, G.
    ULTRASONICS SONOCHEMISTRY, 2006, 13 (06) : 517 - 522
  • [8] Electrochemistry on microcircuits. I: Copper microelectrodes in oxalic acid media
    Gabrielli, C.
    Beitone, L.
    Mace, C.
    Ostermann, E.
    Perrot, H.
    MICROELECTRONIC ENGINEERING, 2008, 85 (08) : 1677 - 1685
  • [9] Reduction of vanadium(v) by oxalic acid in aqueous acid solutions
    Bruyère, VIE
    Rodenas, LAG
    Morando, PJ
    Blesa, MA
    JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 2001, (24): : 3593 - 3597
  • [10] ELECTROCHEMISTRY OF AQUEOUS COPPER-AMMONIA-CARBONATE SOLUTIONS
    LOWER, GW
    ANDREINI, RJ
    JOM-JOURNAL OF METALS, 1975, 27 (12): : A11 - A11
12345