Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

被引：12
作者：
Hyon, CK [1 ]
Choi, SC
Hwang, SW
Ahn, D
Kim, Y
Kim, EK
机构：
[1] Korea Univ, Sch Elect Engn, Sungbuk Ku, Seoul 136701, South Korea
[2] Univ Seoul, Inst Quantum Informat Proc & Syst, Dongdeamun Gu, Seoul 130743, South Korea
[3] Korea Inst Sci & Technol, Semicond Mat Res Lab, Seoul 130650, South Korea
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 12B期
关键词：
nano-structure; AFM; scanning probe lithography; cantilever oscillation; voltage modulation;
D O I：
10.1143/JJAP.38.7257
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.
引用
收藏
页码：7257 / 7259
页数：3
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