共 24 条
[1]
*ASME, 1995, SURF TEXT
[2]
BARNES PY, 1998, 25048 NIST
[4]
Beckmann P, 1987, The scattering of electromagnetic waves from rough surfaces
[6]
MEASUREMENT OF SURFACE-TOPOGRAPHY OF MAGNETIC TAPES BY MIRAU INTERFEROMETRY
[J].
APPLIED OPTICS,
1985, 24 (10)
:1489-1497
[7]
Brodmann R, 1988, P SOC PHOTOOPT INSTR, V1009, P111
[9]
HIGH-SPEED NONCONTACT PROFILER BASED ON SCANNING WHITE-LIGHT INTERFEROMETRY
[J].
APPLIED OPTICS,
1994, 33 (31)
:7334-7338
[10]
Effects of defocus and algorithm on optical step height calibration
[J].
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING,
1999, 23 (03)
:135-143